Invention Grant
- Patent Title: Memory devices and methods of manufacture thereof
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Application No.: US15242193Application Date: 2016-08-19
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Publication No.: US10043919B2Publication Date: 2018-08-07
- Inventor: Alexander Kalnitsky , Hsiao-Chin Tuan , Felix Ying-Kit Tsui , Hau-Yan Lu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company
- Current Assignee: Taiwan Semiconductor Manufacturing Company
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L29/66 ; G11C16/04 ; H01L27/11524 ; H01L29/06 ; H01L29/423 ; H01L27/11558

Abstract:
Representative methods of manufacturing memory devices include forming a transistor with a gate disposed over a workpiece, and forming an erase gate with a tip portion extending towards the workpiece. The transistor includes a source region and a drain region disposed in the workpiece proximate the gate. The erase gate is coupled to the gate of the transistor.
Public/Granted literature
- US20160359052A1 Memory Devices and Methods of Manufacture Thereof Public/Granted day:2016-12-08
Information query
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