- Patent Title: Method to induce strain in finFET channels from an adjacent region
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Application No.: US15197509Application Date: 2016-06-29
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Publication No.: US10043805B2Publication Date: 2018-08-07
- Inventor: Pierre Morin , Nicolas Loubet
- Applicant: STMICROELECTRONICS, INC.
- Applicant Address: US TX Coppell
- Assignee: STMicroelectronics, Inc.
- Current Assignee: STMicroelectronics, Inc.
- Current Assignee Address: US TX Coppell
- Agency: Seed IP Law Group LLP
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L29/78 ; H01L29/16 ; H01L29/66 ; H01L29/10 ; H01L29/165

Abstract:
Methods and structures for forming strained-channel finFETs are described. Fin structures for finFETs may be formed using two epitaxial layers of different lattice constants that are grown over a bulk substrate. A first thin, strained, epitaxial layer may be cut to form strain-relieved base structures for fins. The base structures may be constrained in a strained-relieved state. Fin structures may be epitaxially grown in a second layer over the base structures. The constrained base structures can cause higher amounts of strain to form in the epitaxially-grown fins than would occur for non-constrained base structures.
Public/Granted literature
- US20160307899A1 METHOD TO INDUCE STRAIN IN FINFET CHANNELS FROM AN ADJACENT REGION Public/Granted day:2016-10-20
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