Invention Grant
- Patent Title: Formation method of semiconductor device structure with semiconductor nanowire
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Application No.: US15399143Application Date: 2017-01-05
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Publication No.: US10043665B2Publication Date: 2018-08-07
- Inventor: Shahaji B. More , Zheng-Yang Pan , Cheng-Han Lee , Shih-Chieh Chang , Chandrashekhar Prakash Savant
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/02 ; H01L21/8238 ; H01L27/092 ; H01L29/41 ; H01L29/786 ; H01L29/10 ; H01L29/66

Abstract:
Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a substrate, a first source portion and a first drain portion over the substrate, and a first semiconductor nanowire over the substrate and between the first source portion and the first drain portion. The first semiconductor nanowire includes a first portion over the substrate and a second portion over the first portion, and the first portion has a first width, and the second portion has a second width, and the second width is less than the first width. The semiconductor device structure also includes a first gate structure over the second portion of the first semiconductor nanowire.
Public/Granted literature
- US20180151357A1 FORMATION METHOD OF SEMICONDUCTOR DEVICE STRUCTURE WITH SEMICONDUCTOR NANOWIRE Public/Granted day:2018-05-31
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