Invention Grant
- Patent Title: Integration of automatic and manual defect classification
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Application No.: US13451496Application Date: 2012-04-19
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Publication No.: US10043264B2Publication Date: 2018-08-07
- Inventor: Gadi Greenberg , Idan Kaizerman , Efrat Rozenman
- Applicant: Gadi Greenberg , Idan Kaizerman , Efrat Rozenman
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06K9/03 ; G06K9/62

Abstract:
A method for defect classification includes storing definitions of defect classes in terms of a classification rules in a multi-dimensional feature space. Inspection data associated with defects detected in one or more samples under inspection is received. A plurality of first classification results is generated by applying an automatic classifier to the inspection data based on the definitions, the plurality of first classification results comprising a class label and a corresponding confidence level for a defect. Upon determining that a confidence level for a defect is below a predetermined confidence threshold, a plurality of second classification results are generated by applying at least one inspection modality to the defect. A report is generated comprising a distribution of the defects among the defect classes by combining the plurality of first classification results and the plurality of second classification results.
Public/Granted literature
- US20130279794A1 INTEGRATION OF AUTOMATIC AND MANUAL DEFECT CLASSIFICATION Public/Granted day:2013-10-24
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