Invention Grant
- Patent Title: UV light sensor with stray light suppression, and a method for detecting UV light
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Application No.: US15312522Application Date: 2015-05-19
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Publication No.: US10041829B2Publication Date: 2018-08-07
- Inventor: Thomas Reichel , Lutz Schiffner , Matthias Garzarolli , Matthias Sandig , Lars Gopfert
- Applicant: IDT EUROPE GMBH
- Applicant Address: DE Dresden
- Assignee: IDT Europe GmbH
- Current Assignee: IDT Europe GmbH
- Current Assignee Address: DE Dresden
- Agency: Haynes and Boone, LLP
- Priority: DE102014107062 20140519
- International Application: PCT/EP2015/060969 WO 20150519
- International Announcement: WO2015/177129 WO 20151126
- Main IPC: G01T1/24
- IPC: G01T1/24 ; G01J1/02 ; H01L27/146 ; G01J1/42 ; G01J1/44

Abstract:
The invention relates to a UV light sensor produced in a CMOS method, comprising a substrate that has a surface, one or more sensor elements that detect radiation and are designed in said substrate, at least one passivation layer arranged over said substrate surface, and a functional layer that is arranged over said passivation layer and designed in the form of at least one filter. The problem addressed by the invention of providing a UV light sensor which is sensitive exclusively within the UV wavelength range is solved, in terms of arrangement, by means of filters designed directly on a planar passivation layer, and stray light suppressing means around said at least one sensor element and/or around the UV light sensor. In terms of the method, the problem is solved by measuring two output signal from at least two photo diodes fitted with different filters, and by determining a mathematical relationship between the two output signals.
Public/Granted literature
- US20170108372A1 UV LIGHT SENSOR WITH STRAY LIGHT SUPPRESSION, AND A METHOD FOR DETECTING UV LIGHT Public/Granted day:2017-04-20
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