Invention Grant
- Patent Title: System and method for loading a substrate holder carrying a batch of vertically placed substrates into an atomic layer deposition reactor
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Application No.: US12154879Application Date: 2008-05-27
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Publication No.: US10041169B2Publication Date: 2018-08-07
- Inventor: Sven Lindfors
- Applicant: Sven Lindfors
- Applicant Address: FI Espoo
- Assignee: Picosun Oy
- Current Assignee: Picosun Oy
- Current Assignee Address: FI Espoo
- Agency: Ziegler IP Law Group, LLC
- Main IPC: C30B25/12
- IPC: C30B25/12 ; C23C16/40 ; C23C16/455 ; C30B25/16 ; C30B29/20

Abstract:
The invention relates to methods and apparatus in which precursor vapor is guided along at least one in-feed line into a reaction chamber of a deposition reactor, and material is deposited on surfaces of a batch of vertically placed substrates by establishing a vertical flow of precursor vapor in the reaction chamber and having it enter in a vertical direction in between said vertically placed substrates.
Public/Granted literature
- US20090297710A1 Methods and apparatus for deposition reactors Public/Granted day:2009-12-03
Information query
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