Invention Grant
- Patent Title: Single crystal silicon-carbide substrate and polishing solution
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Application No.: US15662798Application Date: 2017-07-28
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Publication No.: US10040972B2Publication Date: 2018-08-07
- Inventor: Iori Yoshida , Satoshi Takemiya , Hiroyuki Tomonaga
- Applicant: ASAHI GLASS COMPANY, LIMITED
- Applicant Address: JP Chiyoda-ku
- Assignee: ASAHI GLASS COMPANY, LIMITED
- Current Assignee: ASAHI GLASS COMPANY, LIMITED
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-222782 20111007
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/306 ; C09G1/04 ; C30B29/36 ; C30B33/00 ; H01L29/16

Abstract:
A process of manufacturing a single-crystal silicon-carbide substrate, includes contacting a surface of a single-crystal silicon-carbide plate with a surface of a polishing pad; and moving the surface of the single-crystal silicon-carbide plate relative to the surface of the polishing pad while supplying a polishing solution to the surface the polishing pad, to polish the surface of the single-crystal silicon-carbide plate. The polishing pad comprises a non-woven fabric or a porous resin. The polishing solution comprises an oxidizing agent which comprises a transition metal having oxidation-reduction potential of 0.5 V or more. Neither the polishing pad nor the polishing solution comprises an abrasive.
Public/Granted literature
- US20170342298A1 SINGLE-CRYSTAL SILICON-CARBIDE SUBSTRATE AND POLISHING SOLUTION Public/Granted day:2017-11-30
Information query
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