Invention Grant
- Patent Title: Fluoro-alcohol additives for orientation control of block copolymers
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Application No.: US15357786Application Date: 2016-11-21
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Publication No.: US10040879B2Publication Date: 2018-08-07
- Inventor: Joy Cheng , Anindarupa Chunder , Ankit Vora
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Michael R. Roberts
- Main IPC: C09D125/14
- IPC: C09D125/14 ; C08F120/28 ; C09D169/00 ; C08F114/18 ; C08F214/18 ; H01L21/027 ; C08G64/18 ; C08F12/20 ; C08F12/24 ; C08F212/08 ; C09D125/18 ; C08F112/14 ; C08F212/14 ; C09D7/65 ; C08F120/22 ; C08F220/22 ; C08F220/24 ; B82Y30/00 ; C08F220/30

Abstract:
A film layer comprising a high-chi (χ) block copolymer for self-assembly and a hexafluoroalcohol-containing surface active polymer (SAP) was prepared on a substrate surface that was neutral wetting to the domains of the self-assembled block copolymer. The block copolymer comprises at least one polycarbonate block and at least one other block (e.g., a substituted or unsubstituted styrene-based block). The film layer, whose top surface has contact with an atmosphere, self-assembles to form a lamellar or cylindrical domain pattern having perpendicular orientation with respect to the underlying surface. Other morphologies (e.g., islands and holes of height 1.0 Lo) were obtained with films lacking the SAP. The SAP is preferentially miscible with, and lowers the surface energy of, the domain comprising the polycarbonate block.
Public/Granted literature
- US20170066853A1 FLUORO-ALCOHOL ADDITIVES FOR ORIENTATION CONTROL OF BLOCK COPOLYMERS Public/Granted day:2017-03-09
Information query
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