Invention Grant
- Patent Title: Interconnect joint protective layer apparatus and method
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Application No.: US13913599Application Date: 2013-06-10
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Publication No.: US10015888B2Publication Date: 2018-07-03
- Inventor: Cheng-Ting Chen , Hsuan-Ting Kuo , Hsien-Wei Chen , Wen-Hsiung Lu , Ming-Da Cheng , Chung-Shi Liu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H05K3/28
- IPC: H05K3/28 ; H05K3/40 ; H01L23/31 ; H01L21/56 ; H01L23/00

Abstract:
Disclosed herein is a mechanism for forming an interconnect comprising forming a connector on an interconnect disposed on a first surface of a first substrate and applying a nonconductive material in a non-liquid form over the interconnect after forming the connector. The nonconductive material covers at least a lower portion of the interconnect, and at least a portion of the interconnect is exposed. The nonconductive material is formed around the connector by pressing the nonconductive material over the connector with a roller. An angle between a top surface of the nonconductive material and a connector sidewall between about 65 degrees and about 135 degrees. The nonconductive material may be formed to extend under the connector.
Public/Granted literature
- US20140231125A1 Interconnect Joint Protective Layer Apparatus and Method Public/Granted day:2014-08-21
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