A focus adjustment method and a device for the same are capable of realizing automatic focusing on a feature point of an arbitrary object selected from an image in which objects having various shapes are captured. The focus adjustment method includes a first step of obtaining a partial captured image in which a portion of the substrate is captured by the image capture device, and displaying the partial captured image in the image display region having a plurality of divided regions, a second step of causing the in-focus determination device to perform in-focus image determination for one divided region that is selected by a user through the input device, and a third step of displaying the captured image, which has been determined as the in-focus image, in the image display region.