Invention Grant
- Patent Title: Micro-electro-mechanical systems (MEMS), apparatus, and operating methods thereof
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Application No.: US14989056Application Date: 2016-01-06
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Publication No.: US10014870B2Publication Date: 2018-07-03
- Inventor: Yung-Chow Peng , Wen-Hung Huang , Yu-Wei Lin
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: H03M1/12
- IPC: H03M1/12 ; H03M1/00 ; B81B7/00 ; H03M3/00 ; H03M1/06

Abstract:
A method that comprises converting a first electrical signal to a second electrical signal using a converter coupled between a micro-mechanical structure and an analog-to-digital converter (ADC). The method also comprises actuating a switch to selectively interpolate at least one datum between two neighboring converted second electrical signals based on a selected clock signal, wherein the selected clock signal is one of a plurality of clock signals, each clock signals of the plurality of clock signals has a corresponding frequency, and the selected clock signal corresponds to an operating mode of the micro-mechanical structure.
Public/Granted literature
- US20160118993A1 MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS), APPARATUS, AND OPERATING METHODS THEREOF Public/Granted day:2016-04-28
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