Piezoelectric nanoelectromechanical relays
Abstract:
An apparatus comprises: a body terminal comprising a first body electrode and a second body electrode; a gate terminal comprising a first gate electrode and a second gate electrode; a first actuator between the first body electrode and the first gate electrode, the first actuator comprising a first piezoelectric material; a second actuator between the second body electrode and the second gate electrode, the second actuator comprising a second piezoelectric material; a beam comprising a first end attached to the first actuator, a second end attached to the second actuator, and a suspended section between the first end and the second end; a metal channel attached to the suspended section of the beam; a source terminal extending over the beam; and a drain terminal extending over the beam.
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