Invention Grant
- Patent Title: Structure and formation method of semiconductor device with metal gate
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Application No.: US15414449Application Date: 2017-01-24
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Publication No.: US10014394B2Publication Date: 2018-07-03
- Inventor: Che-Cheng Chang , Jui-Ping Chuang , Chen-Hsiang Lu , Yu-Cheng Liu , Wei-Ting Chen
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L29/66 ; H01L21/311

Abstract:
Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a fin structure over a semiconductor substrate. The semiconductor device structure also includes a gate stack covering a portion of the fin structure, and the gate stack includes a work function layer and a metal filling over the work function layer. The semiconductor device structure further includes an isolation element over the semiconductor substrate and adjacent to the gate stack. The isolation element is in direct contact with the work function layer and the metal filling.
Public/Granted literature
- US20170133490A1 Structure and Formation Method of Semiconductor Device Structure Public/Granted day:2017-05-11
Information query
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