Invention Grant
- Patent Title: Super-junction semiconductor device
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Application No.: US15421588Application Date: 2017-02-01
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Publication No.: US10014369B2Publication Date: 2018-07-03
- Inventor: Sung-Nien Tang , Ho-Tai Chen , Hsiu-Wen Hsu
- Applicant: SUPER GROUP SEMICONDUCTOR CO., LTD.
- Applicant Address: TW Hsinchu County
- Assignee: SUPER GROUP SEMICONDUCTOR CO., LTD.
- Current Assignee: SUPER GROUP SEMICONDUCTOR CO., LTD.
- Current Assignee Address: TW Hsinchu County
- Agency: Li & Cai Intellectual Property (USA) Office
- Priority: TW105112421A 20160421
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/10 ; H01L29/78 ; H01L29/40 ; H01L23/58 ; H01L23/60

Abstract:
A super junction semiconductor device is provided. The super-junction semiconductor device includes a substrate, a drift layer disposed on the substrate, an insulating layer, a lightly-doped region, and a main loop-shaped field plate. The drift layer includes a plurality of n- and p-type doped regions alternately arranged in parallel to form a super-junction structure, and defines a cell region and a termination region surrounding the cell region. The lightly-doped region is formed in the drift layer and connected to a surface of the drift layer. The lightly-doped region has a first end portion closer to the cell region and a second end portion farther away from the cell region. The insulating layer disposed on the drift layer covers the termination region. The main loop-shaped field plate is disposed on the insulating layer and covers the second end portion.
Public/Granted literature
- US20170309705A1 SUPER-JUNCTION SEMICONDUCTOR DEVICE Public/Granted day:2017-10-26
Information query
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