Invention Grant
- Patent Title: Semiconductor device having resistance elements and fabrication method thereof
-
Application No.: US15402367Application Date: 2017-01-10
-
Publication No.: US10014363B2Publication Date: 2018-07-03
- Inventor: Taiji Ema , Nobuhiro Misawa , Kazuyuki Kumeno , Makoto Yasuda
- Applicant: MIE FUJITSU SEMICONDUCTOR LIMITED
- Applicant Address: JP Kuwana
- Assignee: MIE FUJITSU SEMICONDUCTOR LIMITED
- Current Assignee: MIE FUJITSU SEMICONDUCTOR LIMITED
- Current Assignee Address: JP Kuwana
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2016-029457 20160219
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L29/8605 ; H01L49/02 ; H01L27/08

Abstract:
A semiconductor device includes as a resistance element a first polycrystalline silicon and a second polycrystalline silicon containing impurities, such as boron, of the same kind and having different widths. The first polycrystalline silicon contains the impurities at a concentration CX. The second polycrystalline silicon has a width larger than a width of the first polycrystalline silicon and contains the impurities of the same kind at a concentration CY lower than the concentration CX. A sign of a temperature coefficient of resistance (TCR) of the first polycrystalline silicon changes at the concentration CX. A sign of a TCR of the second polycrystalline silicon changes at the concentration CY.
Public/Granted literature
- US20170243934A1 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE FABRICATION METHOD Public/Granted day:2017-08-24
Information query
IPC分类: