Invention Grant
- Patent Title: Substrate conveyance robot and operating method thereof
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Application No.: US14968148Application Date: 2015-12-14
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Publication No.: US10014205B2Publication Date: 2018-07-03
- Inventor: Masaya Yoshida , Takao Yamaguchi , Yuji Tanaka , Hajime Nakahara , Avish Ashok Bharwani , Ming Zeng , Hui Kuen Chan
- Applicant: KAWASAKI JUKOGYO KABUSHIKI KAISHA , KAWASAKI ROBOTICS (USA), INC.
- Applicant Address: JP Kobe US MI Wixom
- Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA,KAWASAKI ROBOTICS (USA), INC.
- Current Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA,KAWASAKI ROBOTICS (USA), INC.
- Current Assignee Address: JP Kobe US MI Wixom
- Agency: Oliff PLC
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/67 ; H01L21/687 ; H01L21/677
Abstract:
A substrate conveyance robot has an end effector provided to a robot arm and including a substrate holding unit configured to hold a substrate, arm drive unit configured to drive the robot arm, a robot control unit configured to control the arm drive unit, and a holding force detection unit configured to detect a substrate holding force exerted by the substrate holding unit. The robot control unit controls the arm drive unit based on an upper limit value of at least one of acceleration and speed of the end effector which are determined in accordance with the substrate holding force detected by the holding force detection unit.
Public/Granted literature
- US20170170050A1 SUBSTRATE CONVEYANCE ROBOT AND OPERATING METHOD THEREOF Public/Granted day:2017-06-15
Information query
IPC分类:
