Invention Grant
- Patent Title: Cavity package with pre-molded substrate
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Application No.: US15493167Application Date: 2017-04-21
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Publication No.: US10014187B2Publication Date: 2018-07-03
- Inventor: Chun Ho Fan
- Applicant: Ubotic Company Limited
- Applicant Address: CN Tsuen Wan, Hong Kong
- Assignee: UBOTIC COMPANY LIMITED
- Current Assignee: UBOTIC COMPANY LIMITED
- Current Assignee Address: CN Tsuen Wan, Hong Kong
- Agency: Keating and Bennett, LLP
- Main IPC: H01L21/48
- IPC: H01L21/48 ; H01L21/52 ; H01L23/495 ; H01L23/04

Abstract:
A cavity package is set forth along with a method of manufacturing thereof. The method comprises applying a selective plating resist to a metallic substrate in a pattern to expose portions for a ring, tie bars, die attach pad and input/output wire bonding pads; elective depositing of metal plating using the selective plating resist; removing the selective metal plating resist; applying a selective etching resist to the substrate; selectively etching portions of the substrate not covered by the selective etching resist; stripping away the selective etching resist; pre-molding a leadframe to the substrate so as to surround the die attach pad portion; etching the tie bars away from the bottom surface of the substrate; attaching a semiconductor device die to the die attach pad; wire bonding the semiconductor device to the input/output wire bonding pads; and attaching a cap to the ring portion of the substrate and the die attach pad to protect the wire bonded semiconductor device die and permit electrical grounding.
Public/Granted literature
- US20170221726A1 CAVITY PACKAGE WITH PRE-MOLDED SUBSTRATE Public/Granted day:2017-08-03
Information query
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