Invention Grant
- Patent Title: Plasma generation apparatus for generating toroidal plasma
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Application No.: US15247517Application Date: 2016-08-25
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Publication No.: US10014162B2Publication Date: 2018-07-03
- Inventor: Michio Taniguchi , Shigeki Amadatsu
- Applicant: DAIHEN Corporation
- Applicant Address: JP Osaka
- Assignee: DAIHEN Corporation
- Current Assignee: DAIHEN Corporation
- Current Assignee Address: JP Osaka
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JP2015-168894 20150828
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
An inductive-coupling plasma generation apparatus in which coupling can be made stronger and power can be used more effectively than in a conventional technique. The inductive-coupling plasma generation apparatus includes an electroconductive chamber with a toroidal-shaped electrical discharge space formed inside. The plasma generation apparatus also includes a high-frequency power source connected to the chamber. The power source is configured to cause a high-frequency current to flow through electroconductive material forming the chamber along a toroidal direction.
Public/Granted literature
- US20170062183A1 PLASMA GENERATION APPARATUS Public/Granted day:2017-03-02
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