Invention Grant
- Patent Title: L10-ordered MnAl thin films with high perpendicular magnetic anisotropy, and structures and devices made therewith
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Application No.: US15515380Application Date: 2015-10-02
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Publication No.: US10014013B2Publication Date: 2018-07-03
- Inventor: Mark H. Kryder , Efrem Y. Huang
- Applicant: Carnegie Mellon University
- Applicant Address: US PA Pittsburgh
- Assignee: Carnegie Mellon University
- Current Assignee: Carnegie Mellon University
- Current Assignee Address: US PA Pittsburgh
- Agency: Downs Rachlin Martin PLLC
- International Application: PCT/US2015/053692 WO 20151002
- International Announcement: WO2016/054489 WO 20160407
- Main IPC: H01L29/82
- IPC: H01L29/82 ; G11B5/39 ; G11C11/16 ; G11B5/127 ; H01L43/08 ; H01L43/10

Abstract:
A stacked-thin-film structure that includes an Llo-ordered MnAl layer having high perpendicular magnetic anisotropy (PMA). In some embodiments, the Ll0-ordered MnAl layer has an Mn content in a range of about 35% to about 65%, a thickness less than about 50 nm, a saturation magnetization of about 100 emu/cm3 to about 600 emu/cm3 and a magnetocrystalline anisotropy of at least 1×106 erg/cm. In some embodiments, the high-PMA Llo-ordered MnAl material is incorporated in magnetic tunneling junction stacked-film structures that are part of magnetoelectronic circuitry, such as spin-transfer-torque magnetoresistive random access memory circuitry and magnetic logic circuitry. In some embodiments, the high-PMA Llo-ordered MnAl material is incorporated into other devices, such as into read/write heads and/or recording media of hard-disk-drive devices.
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