Invention Grant
- Patent Title: Projection exposure apparatus with wavefront measuring device and optical wavefront manipulator
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Application No.: US15618395Application Date: 2017-06-09
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Publication No.: US10012911B2Publication Date: 2018-07-03
- Inventor: Michael Arnz , Sascha Bleidistel , Toralf Gruner , Joachim Hartjes , Markus Schwab
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102014226269 20141217
- Main IPC: G03B27/68
- IPC: G03B27/68 ; G03F7/20

Abstract:
A projection exposure apparatus includes a projection lens, a wavefront manipulator and a wavefront measuring device for measuring a wavefront in the projection lens. The wavefront measuring device includes a Moiré grating arrangement having an object grating and an image grating which are designed to be arranged in an object plane and an image plane, respectively, of the projection lens. The object grating and the image grating are coordinated with one another in a manner true to scale in such a way as to generate a Moiré superimposition pattern from an imaging of the object grating onto the image plane and the image grating. The Moiré grating arrangement is designed in such a way as to simultaneously generate the Moiré superimposition pattern for a plurality of field points of an object field in the object plane and/or of an image field in the image plane.
Public/Granted literature
- US20170336714A1 PROJECTION EXPOSURE APPARATUS WITH WAVEFRONT MEASURING DEVICE AND OPTICAL WAVEFRONT MANIPULATOR Public/Granted day:2017-11-23
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