Invention Grant
- Patent Title: Sacrificial coupler for testing V-grooved integrated circuits
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Application No.: US15198061Application Date: 2016-06-30
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Publication No.: US10012798B2Publication Date: 2018-07-03
- Inventor: Tymon Barwicz , William M. J. Green , Marwan H. Khater , Jessie C. Rosenberg
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: G02B6/30
- IPC: G02B6/30 ; G02B6/136 ; G02B6/34 ; H01L21/66 ; G02B6/12 ; G02B6/124 ; G02B6/122

Abstract:
Embodiments are directed to a method of forming an optical coupler system. The method includes forming at least one waveguide over a substrate, and forming gratings in a first region over the substrate. The method further includes configuring the gratings to couple optical signals to or from the at least one waveguide, and forming a v-groove in the first region over the substrate, wherein forming the v-groove includes removing the gratings from the first region.
Public/Granted literature
- US20180003898A1 SACRIFICIAL COUPLER FOR TESTING V-GROOVED INTEGRATED CIRCUITS Public/Granted day:2018-01-04
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