Film-forming apparatus and film-forming method
Abstract:
A film-forming apparatus and method capable of film lamination with superior evenness and good followability regardless of the size, shape and number of articles being laminated. The film-forming apparatus provided has a first chamber that is provided with a heating means and that is capable of maintaining a vacuum or a pressurized state, a second chamber that is disposed so as to be able to be joined to, and separated from, the first chamber, that is provided with a movable supporting table on which an article is supported and that is capable of maintaining a vacuum or a pressurized state, a frame-like film holding member that is disposed between the first chamber and the second chamber and that holds a film, and an auxiliary film pressing tool having a film pressing part that inhibits lifting of the film when the film is laminated on a surface of the article.
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