Invention Grant
- Patent Title: Fixed-abrasive-grain wire, wire saw, and method for slicing workpiece
-
Application No.: US15311325Application Date: 2015-03-18
-
Publication No.: US10011046B2Publication Date: 2018-07-03
- Inventor: Tadahiro Kato
- Applicant: SHIN-ETSU HANDOTAI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-110503 20140528
- International Application: PCT/JP2015/001501 WO 20150318
- International Announcement: WO2015/182023 WO 20151203
- Main IPC: B28D5/04
- IPC: B28D5/04 ; B24B27/06 ; B24D3/00 ; B24D11/00 ; H01L21/304 ; B28D5/00 ; B23D61/18

Abstract:
The present invention is a fixed-abrasive-grain wire including a core wire and abrasive grains fixed on a surface of the core wire, wherein an abrasive grain density is 1200 grains/mm2 or more, where the abrasive grain density is the number of the abrasive grains per unit area on the surface of the core wire, and 2% or less of all distances between centroids of the abrasive grains are equal to or shorter than an average circle equivalent diameter of the whole abrasive grains. There can be provided a fixed-abrasive-grain wire, a wire saw, and a method for slicing a workpiece that can suppress meandering of the fixed-abrasive-grain wire during slicing a workpiece and improve TTV and warp of wafers sliced from the workpiece.
Public/Granted literature
- US20170072594A1 FIXED-ABRASIVE-GRAIN WIRE, WIRE SAW, AND METHOD FOR SLICING WORKPIECE Public/Granted day:2017-03-16
Information query