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Invention Publication
CN105643107A 在激光退火系统中用于控制边缘轮廓的定制光瞳光阑形状 有权

在激光退火系统中用于控制边缘轮廓的定制光瞳光阑形状
Abstract:
本发明的实施方式一般涉及具有用于将图案成像于基板上的光学元件的激光退火系统。光学元件可包含将图像整形以暴露于基板的表面上的多个孔或一个孔。该图像可由光学元件系统内的孔的形状加以确定。
Abstract(English):

Embodiments of the invention generally relate to laser annealing systems with optics for imaging a pattern on a substrate. The optics may comprise an aperture or plurality of apertures which shape an image to be exposed on a surface of a substrate. The image may be determined by the shape of an aperture within the optics system.

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