知搜-全球专利检索

  1. Login
  2. Sign Up
Invention Grant
CN101681117B 照明光学装置、曝光装置及元件制造方法 失效 - 权利终止

  • Patent Title: 照明光学装置、曝光装置及元件制造方法
  • Patent Title (English): Illumination optical apparatus, exposure apparatus, and device manufacturing method
  • Application No.: CN200880015567.9
    Application Date: 2008-10-10
  • Publication No.: CN101681117B
    Publication Date: 2014-05-14
  • Inventor: 广田弘之
  • Applicant: 株式会社尼康
  • Applicant Address: 日本东京
  • Assignee: 株式会社尼康
  • Current Assignee: 株式会社尼康
  • Current Assignee Address: 日本东京
  • Agency: 北京中原华和知识产权代理有限责任公司
  • Agent 寿宁
  • Priority: 266691/2007 2007.10.12 JP
  • International Application: PCT/JP2008/068909 2008.10.10
  • International Announcement: WO2009/048170 EN 2009.04.16
  • Date entered country: 2009-11-10
  • Main IPC: G03F7/20
  • IPC: G03F7/20
照明光学装置、曝光装置及元件制造方法
Abstract:
照明光学装置13将输出自曝光用光源12的曝光用光EL导向被照射物体R。照明光学装置13具备排列成矩阵状的多个空间光调变构件22，各空间光调变构件22将具有可动反射面的多个反射光学元件排列成矩阵状而分别构成。又，各空间光调变构件中的至少1个配置在从光源输出的光的光路内。
Abstract(English):

An illumination optical apparatus (13) guides exposure light (EL) emitted from an exposure light source (12), to an illumination target object (R). The illumination optical apparatus (13) has a plurality of spatial light modulation members (22) arranged in an array form, and each spatial light modulation member (22) is so configured that a plurality of reflecting optical elements each including a movable reflecting surface are arranged in an array form. At least one of the spatial light modulation members is arranged in an optical path of the light emitted from the light source.

Public/Granted literature
Patent Agency Ranking
0/0